TOPProducts > Annealing systems


Vacuum Equipment Guide

Thermal annealing system

Ayumi introduces a series of thermal annealing systems to be used from R&D applications to high-volume manufacturing. Followings are the technical capabilities of these systems.

  • Support almost any substrates, such as Si, glass, compound semiconductors, vacuum components, etc.
  • Have various system to support single substrate process to multiple wafer processing batch systems
  • Have in-line systems supporting single substrate or multiple substrates
  • Selectable annealing gas (N2, Ar, N2+Ar etc.)
  • Vacuum annealing capability
  • Able to attach with glow box
ページトップ TOPへ戻る
Product Guide
Information Vacuum
News & Topics
60 Kagumachi, Bessho-cho, Himeji-shi, Hyogo-ken 671-0225
TEL +81-79-253-2771
FAX +81-79-253-6179
Tokyo Office
3-13-11, Nihonbashi, Cyuo-ku, Tokyo 103-0027
TEL +81-3-3548-2610
FAX +81-3-3231-3460
Izumo Factory
659-40, Nagahama-cho, Izumo-shi, Shimane-ken 693-0043
TEL +81-853--28-2771
FAX +81-853-28-2775
About us
Contact Us
Page Top