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Vacuum Equipment Guide

Thermal annealing system

Ayumi introduces a series of thermal annealing systems to be used from R&D applications to high-volume manufacturing. Followings are the technical capabilities of these systems.

  • Support almost any substrates, such as Si, glass, compound semiconductors, vacuum components, etc.
  • Have various system to support single substrate process to multiple wafer processing batch systems
  • Have in-line systems supporting single substrate or multiple substrates
  • Selectable annealing gas (N2, Ar, N2+Ar etc.)
  • Vacuum annealing capability
  • Able to attach with glow box
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