Thermal annealing system
Ayumi introduces a series of thermal annealing systems to be used from R&D applications to high-volume manufacturing. Followings are the technical capabilities of these systems.
- Support almost any substrates, such as Si, glass, compound semiconductors, vacuum components, etc.
- Have various system to support single substrate process to multiple wafer processing batch systems
- Have in-line systems supporting single substrate or multiple substrates
- Selectable annealing gas (N2, Ar, N2+Ar etc.)
- Vacuum annealing capability
- Able to attach with glow box