Features
1 Seal part uses copper gasket, seal edge structure.- Tightening torque is small.
- It is possible to bake out up to 350℃.
- It can be used up to a vacuum of 10⁻⁸ Pa or less.
- Disk exchange is possible.
Specifications
| Format | ML-03M |
| Leak volume | Atmospheric pressure to 10⁻⁸ Pa or less |
| Operating temperature range | 0 to 300 ℃ |
| Applicable pressure | 6.7 × 10⁻¹¹ Pa · m³ / sec or less |
| Conductance (Full open) | 8.5ℓ / sec |
| Sealing torque | 5 to 7 N · m |
| Connection flange | ICF 34 |
| Torque wrench angle drive size | 6.35 |
| Main part material | Body: SUS304 Sealing material: OFC SUS304 (Molded Bellows) |
Dimension drawing
Introduction of corresponding products
