Features
- L-type valve is manufactured as a series for versatile vacuum.
- The main body of 25A / 40A / 50A size is classified by connection flange and drive method.
- Small size and large conductance.
- Simple structure and low cost.
- For each size air drive type, 1,000,000 cycles long life span type can be manufactured.
Specifications
| Shaft seal O ring type | Shaft seal bellows type | |
| Applicable pressure |
Atmospheric pressure ～10⁻⁵Pa |
Atmospheric pressure ～10⁻⁷ Pa |
| Leak volume | 6.5×10-9Pa・ｍ3 / sec | 6.5×10-10Pa・ｍ3 / sec |
| Material | Fixed seal: Viton Shaft seal: Ring Body: SUS304 |
Fixed seal: Viton Shaft seal: Bellows Body: SUS304 |
| Operation air pressure | 0.4 MPa or more | 0.4 MPa or more |
Dimensional drawing
| Connection flange | A | B | C | D | |
| 25A | NW25 | 45 | 45 | 139 | 45 |
| φ90 JIS Flange | 60 | 60 | 154 | 45 | |
| 40A | NW40 | 55 | 55 | 172 | 56 |
| φ105 JIS Flange | 68 | 68 | 185 | 56 | |
| 50A | NW50 | 65 | 65 | 194 | 65 |
| φ120 JIS Flange | 75 | 75 | 204 | 65 |